Vacuum plasma cleaning machine

Features Desktop minicomputers, PLC man-machine automatic control, easy to use, small quantities for laboratory and industrial production, surface cleaning, etching, activation and other technology. >> Specifications ◆ Dimensions 570 (W) × 420 (D) × 740 (H) mm ◆ warehouse structure (stainless steel, about 20 liters) 420 (W) × 270 (D) × 170 (H) mm ◆ electrode Area 250 (W) × 190 (D) mm, 3 layer ◆ cleaning mode RIE or DP mode automatic conversion ◆ plasma generator (Korea KM) frequency 13.56MHZ, power 0-500W continuous adjustment, automatic impedance matching ◆ control system touch screen ( 7 inch) + PLC single-step automatic control, Omron, Siemens and other world famous brands electrical components, stable and reliable performance, and with manual and automatic modes ◆ vacuum system Leybold (Leybold) vacuum D30C (37m3 / h ) imported pneumatic angle valve, fill valve, Germany (Inficon) pressure transducer ◆ pressure control PID closed-loop automatic voltage control ◆ air system 2-way road nitrogen process gas +1 configuration, electronic mass flow meter, needle, American FITOK (FITOK) gas pipeline