Shimadzu UV spectrophotometer

Suitable for optical, semiconductor and FPD applications - Shimadzu UV-VIS-NIR spectrophotometer is a top high sensitivity spectrophotometer can detect deep ultraviolet region, with large sample chamber to meet the optical, semiconductor and FPD in The following aspects of the inspection requirements. FPD: high sensitivity in the NIR material evaluation and determination of a large sample. Semiconductors: DUV area short wavelength laser and 12 inches overall wafer surface was measured. Optical Communication: antireflection coating NIR measurement with high sensitivity. Optics: then high sensitivity analysis of a large sample from DUV to NIR. SolidSpec-3700 / 3700DUV characteristics of high sensitivity and 3700DUV SolidSpec-3700 is the first to use three detectors spectrophotometer: a photomultiplier tube (PMT) detector detects the ultraviolet and visible region, near infrared detection using InGaAs and PbS device. InGaAs and PbS detectors so that the sensitivity of the use of near-infrared region is significantly enhanced. DUV region detection SolidSpec-3700DUV have the ability to detect deep ultraviolet region can be determined to 165nm or 175nm integrating sphere. This test is purged with nitrogen and the sample chamber ray room of. NOTE: 165nm is SolidSpec-3700DUV directly affected by the use of the shortest wavelength of light measurement unit DDU-DUV) is. Large sample compartment Large sample chamber (900W x 700D x 350H mm) can be detected under the premise of no damage to large samples. Vertical light path can be directly measured large sample while maintaining their horizontal state. Use automatic XY sample stage (optional) measurement sample size is 12 inches or 310 × 310mm. Optional Accessories Optional Components Direct Detection Unit DDU / DDU-DUV (for liquid / solid transmission measurements) directly affected by the light unit DDU / DDU-DUV for liquid and solid samples permeability tester automatic XY sample stage (automatic measurement) Large specular reflectance accessory nitrogen flow means absolute specular reflectance accessory (5 ° 12 ° 30 ° 45 °) sphere Remove the tray one software SolidSpec-3700 / 3700DUV of UVProbe software include spectral module, brightness module, kinetics and reporting module functions. Multiple safety and traceability in order to ensure the reliability of deleted data. Optical components need to transmittance and reflectance measured with high precision. SolidSpec-3700 / 37000DUV have three detectors, coverage from ultraviolet to near-infrared region. By using InGaAs and PbS detectors cooled to improve the sensitivity of the near-infrared region. Resulting in high precision and high sensitivity spectrum from the ultraviolet to the near infrared region. Traditional spectrophotometers using a photomultiplier tube to detect the ultraviolet and visible regions. But all detectors in the detector sensitivity range to convert low, and therefore can not be achieved in this range when measured with high sensitivity detection. SolidSpec-3700 / 3700DUV by using InGaAs detector can be detected with high sensitivity in the conversion. High sensitivity detection InGaAs detector and a PbS detector measures a sharp cut-off filter transmittance spectra shown below: SolidSpec-3700 / 3700DUV range from 850 to 1600nm achieve a low noise level, and the traditional spectrophotometer compared to 1300 to 1600nm range, noise reduction by a quarter. SolidSpec-3700 / 3700DUV in 1300-1500nm, under the premise of transmission of less than 1%, the noise level of less than 0.1%. High sensitivity analysis of this wavelength range makes SolidSpec-3700 / 3700DUV become detect low-reflection sample powerful tools, such as anti-reflection coatings and films for use in optical transmission. 1500nm noise at the optimal level for the world, less than 0.00005Abs (slit width 8nm, RMS), delete the use of direct light-receiving unit DDU / DDU-DUV. Less than 0.00003Abs (slit width 2nm, RMS) Along with ArF excimer laser for the development of the representative of the use of high-precision laser DUV laser instrument to improve the deep ultraviolet region of the optical material transmittance and reflectance measurement requirements. SolidSpec-3700DUV when using an integrating sphere can be in the range of 175nm-2600nm measurement, and the use of optional direct light-receiving unit DDU-DUV may be determined in the range of 165nm-3300nm. With this accessory, enabling measurement from the deep ultraviolet to near-infrared region wide range. Oxygen molecules in the air absorb deep UV 190nm or less, use a nitrogen purge ray room and sample room to remove the interference of oxygen molecules. SolidSpec-3700DUV each unit has a purging inlet, it can be fully purged with nitrogen, in order to achieve high sensitivity and low stray light DUV region. For the determination of the deep ultraviolet region, the inner wall of windows and integrating sphere detector are using does not absorb deep UV material, SolidSpec-3700DUV a PMT detector uses special fused quartz as a window material, the inner wall of the integrating sphere using deep ultraviolet region having a high special resin reflective properties. DUV region with high sensitivity and low stray light measurement precision measurement requirements DUV region sufficient luminous flux and low stray light. The right is determined using the transmittance spectra of quartz plates directly affected by the light unit DDU-DUV (optional). Ultra low noise can be obtained in the ultraviolet region of the spectrum. SolidSpec-3700 / 3700DUV with a large sample chamber allows large samples for non-destructive testing. Its internal dimensions of 900W x 700D x 350H. Measurable maximum sample size 700W x 560D x 40H mm. Sample size is 12 inches or 310 x 310 mm samples available automatic XY sample stage (optional) with XY sample stage large sample chamber with XY sample stage measuring 12 inches wafer automatically detected as SolidSpec-3700 / 3700DUV developed automatic XY sample stage can automatically detect a specified point in advance, while at the same nitrogen purge. 12-inch silicon wafer thickness measuring the reflection spectrum of SiO2 film 12-inch thin-film silicon