Vacuum equipment vacuum coating plating equipment machinery vacuum machine

Utilization of vacuum coating vacuum arc discharge principle of ion plating technology, is the first developed with a high deposition rate, combined with a solid, stable operation of equipment, etc., we are in the traditional multi-arc on the target structure, magnets, cooling improvements and a rigorous design and improve the ionization rate, thinning particles, the film and the substrate binding firmer, denser layers, wear resistance increased significantly hardness, thickness can be controlled at 0.5 microns -5 m between ordinary decorative coating and tool coating preferred model. According to the market demand for the company developed the auxiliary anode, magnetic filter, rectangular planar target, cylindrical rotating arc target and other derivative products, and the deposited film to reach the nanometer scale, is the preparation of high hardness, high adhesion, high resistance membrane ta-C , DLC, a good choice for high-quality metal film. Technical parameters: ▲ vacuum chamber box: The main specifications are 800 * 1000mm, 1000 * 1200mm, 1200 * 1500mm, 1500 * 1600mm, 1800 * 1950mm, and can be specifically designed non-standard products according to customers. ▲ fixture: the use of public rotation planetary gear structure, workpiece speed 1-15 r / min adjustable, hanging with six axes 8 axes, 10 axes, 12 axes, and other specifications for different sizes of decoration, tools coating. ▲ control gas method: mass flow control, inlet stability, fast response, it can be equipped with automatic pressure increase control. ▲ Target: The overall manufacturing technology and reasonable and simple structure, easy maintenance replacement target, automatic / manual arc function. ▲ Power: Configuration DC pulse power supply (voltage, the duty cycle can be adjusted), inverter arc power supply. ▲ exhaust system: domestic brand mechanical pumps, Roots pumps, diffusion pumps, determine a reasonable model according to the vacuum chamber size. It can also be equipped with molecular pump or the pump inlet according to customer needs. ▲ vacuum parameters: from the atmosphere evacuated to 5 * 10ˉ3Pa≤15min ultimate vacuum 8 * 10ˉ4Pa control system can use the manual controls; computer control, touch-screen control panel.