Vapor deposition CVD furnace
Vapor deposition CVD furnace
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Chemical vapor deposition CVD chemical vapor deposition, vapor deposition furnace furnace furnace applications of chemical vapor deposition (deposition of carbon) can be used to hydrocarbon gases (such as C3H8, etc.) as a carbon source composite material, such as C / C composites, SiC composites such as CVD, CVI treatment. Chemical vapor deposition furnace Product Specifications Model / Spec W × H × L (mm) 600 * 600 * 1000 800 * 800 * 1200 1000 * 1000 * 1500 1200 * 1200 * 2500 1500 * 1500 * 3000 2500 * 2000 * 3600 loaded weight (KG) 350 800 1500 2500 5000 10000 maximum temperature (℃) 1500 1500 1500 1500 1500 1500 temperature uniformity (℃) ± 7.5 ± 7.5 ± 7.5 ± 10 ± 10 ± 15 heating power (kw) 250 360 480 600 900 1200 limit the degree of vacuum (Pa) 20 20 20 20 20 20 pressure rise rate (Pa / h) 0.67 0.67 0.67 0.67 0.67 0.67 above chemical vapor deposition furnace parameters can be adjusted according to process requirements, not as a basis for acceptance, the specific technical solutions and protocols for Associate. Chemical vapor deposition furnace door main configurations: // screw lift hydraulic lift / manual lifting; manual locking / automatic locking collar locking furnace shell: Full Carbon / inner stainless steel / all stainless steel furnace: carbon felt soft / soft graphite felt / rigid composite mat / CFC heaters: isostatic graphite / molded three high graphite / fine grain graphite process gas system: volume / mass flowmeter; manual valve / automatic valve; import / domestic vacuum pumps and vacuum gauges - - import / domestic PLC: Omron / Siemens temperature control: the Japanese island of electrical / UK Continental Thermocouple: C indexing number / S No indexing / K indexing number / N indexing number Recorder: paperless recorder / paper recorder; import / domestic human-machine interface: analog screen / touch screen / IPC electrical components: Chint / Schneider / Siemens skip: Raceway / forklift / stacking long transmission skip the technical features of the chemical vapor deposition furnace The chemical vapor deposition furnace maximum workspace size up to 2.5m × 2m × 4.5m, to meet the large demand artifacts chemical vapor deposition process; this chemical vapor deposition furnace using multi-zone independent temperature control, temperature uniformity; this chemical vapor deposition furnace deposition chamber with a special structure, good sealing effect, strong anti-pollution; this chemical vapor deposition furnace using a multi-channel deposition gas line, the flow field uniformity, no dead angle deposition, the deposition effect is good; this chemical vapor deposition of carbon deposition furnace produced during the tar, solid dust, organic gas can be effectively treated.
Contact Detail
Company Name: | Zhuzhou Xin Yun Technology Development Co., Ltd. |
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Employee Number: | |
Annual export: | |
Year Established: | |
Contact Person: | Mr. Zhao Xiang() |
Telephone Number: | 0731 22285308 |
Company Address: | Yunlong demonstration area, Zhuzhou City, Hunan Province, China |
Zip/Postal Code: |
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